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Department of Nano & Electronic Physics

Kookmin University

861-1 Jeongneung-Dong, Seonbuk-Gu

Seoul, 136-702 Korea

kookmin

Nanomechanical motion transduction techniques

Mechanical motion has been regaining its place in the science and engineering. Along with the scaling down of the electronic devices, mechanical systems have been miniaturized down to the deep submicron region. Recent development of micro- and nanoelectromechanical systems(NEMS) as well as the microcantilevers in the atomic force microscopy has shown that these mechanical systems can provide unique opportunities in diverse applications such as sensing and signal processing elements. These mechanical devices show small mechanical displacements, typically in the range of nanometer. Therefore much of research effort has been focused on the development of proper motion detection techniques as well as the fabrication processes. Especially for the room-temperature operation of these systems, optical approaches have been mainly considered. In case of nanomechanical systems, the optical interferometry and optical knife-edge technique have been utilized to detect the nanomechanical motion at the flexural resonant mode. In these optical approaches, the displacement sensitivity is one of the key factors ensuring the operation of these mechanical systems. Especially, as the size of the device shrinks below the submicron region, the operation of the optical system is greatly influenced by the diffraction effect, and below the diffraction limit, the optical sensitivity degrades rapidly with the dimension of the device to be probed. At Applied NanoPhysics Lab, our research effort focuses on the development of the nanomechanical motion transduction techniques with high sensitivity and wide bandwidth to investigate the dynamics of mesoscopic systems and their applications.

template based Nanofabrication

One of the main areas in the field of nanotechnology is fabricating nanostructures and nanodevices as well as measuring and manipulating them. A particular emphasis has been placed on the fabrication of meso/microscopic systems, which enable us to explore the exotic physical phenomena in the deep sub-micron region. Typical fabrication of nanostructures with various shapes and dimensions has been performed by the conventional electron beam lithography. Recently many of research efforts have been focused on developing template-based fabrication techniques such as nano-imprint technique, which enables parallel processes. Among these newly emerging techniques, anodized aluminium oxide (AAO) has been gained much interest due to the formation of a porous structure. Since the array of pores on the surface of AAO is highly ordered with a high pore density, and the dimensions of the porous structure such as the size of the pores and the separation between them can be easily varied by controlling the anodization conditions, AAO can be favorably employed as a template for the nanostructure fabrication. In addition, one of advantages using AAO is that the porous substrate can be easily prepared using a rather simple anodization method. At Applied NanoPhysics Lab, we would like to explore the possibility of fabrication of nanostructures based on AAO template.

AAO